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Electronic Components, Technology and Materials

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Electronic Components, Technology and Materials
Department of Microelectronics
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GeneralProbe stations for wafer-scale and single die DC measurements Special (sensor) characterization setups Micro/Nano System Integration and ReliabilityReliability measurement setups

Special (sensor) characterization setups

Contact: Sten Vollebregt

Dedicated permanent setups for measuring (packaged) chips under environmental conditions that cannot be provided by the wafer probe stations. We have setups for controlling temperature, pressure and UV.

Items under this topic

Nextron differential probe station

Lab infrastructure, Jun 2026

Nextron micro probe station 2

Lab infrastructure, Nov 2023

Gas sensor test setup

Lab infrastructure, Oct 2022

FEI XL30 SFEG SEM

XL30 scanning electron microscope with various detectors

Lab infrastructure, Dec 2021

Nextron micro probe station 1

Lab infrastructure, May 2020

Reconfigurable measurement setup

Lab infrastructure, May 2020

Electronic Components, Technology and Materials

TU Delft
Fac. EEMCS
Mekelweg 4
2628 CD Delft

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